Introduction
Bimonthly, started in 1957
Administrator
Shanxi Provincial Education Department
Sponsor
Taiyuan University of Technology
Publisher
Ed. Office of Journal of TYUT
Editor-in-Chief
SUN Hongbin
ISSN: 1007-9432
CN: 14-1220/N
Administrator
Shanxi Provincial Education Department
Sponsor
Taiyuan University of Technology
Publisher
Ed. Office of Journal of TYUT
Editor-in-Chief
SUN Hongbin
ISSN: 1007-9432
CN: 14-1220/N
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Optical Interference Measurement and Control System of Piezoelectric Ceramic Micro-Displacement
DOI:
10.16355/j.cnki.issn1007-9432tyut.2018.04.015
Received:
Accepted:
abstract:
In this paper, the optical amplification device based on multiple reflections is introduced for the micro-displacement detection of piezoelectric ceramics, which can effectively improve the resolution of Michelson interferometer.The relationship between the magnification, the incident angle and the angle of the mirror is analyzed theoretically, and the optical amplification characteristics of the optical path are simulated.Then the high precision optical interferometric displacement measurement system is set up to realize the drive and detection of the piezoelectric ceramics with 22.6 nm as the step length.The utility model has a simple structure and can be controlled easily.It can be used to the optical filtering system.
Keywords:
micro-displacement measurement; piezoelectric actuator; Michelson interferometry; optical amplifier system; open-loop control;